Here is a step-by-step example attachment:README.txt
You will also need to download the structural for this subject, together with a mat file coding the subject's fiducials (in MRI space) and some text files coding the event-types attachment:CBUMegDemo.zip
Here is a batch script for doing steps 1+2 for FIF data on our machine: attachment:spm5_meg_batch_preproc.m